Brooks Automation 001-4130-03 is a VCE wafer aligner control module, the core control unit of Brooks wafer pre-aligner and wafer handler systems. It executes high-precision motion control and wafer position detection, completing notch/flat alignment and centering for silicon wafers before transferring to lithography, etching or deposition process stations. It is a critical spare part for semiconductor fab automation equipment, designed to work in cleanroom environments.

Key Features

• Dedicated VCE controller for Brooks wafer pre-aligner

• Sub-micron level wafer alignment and centering accuracy

• Integrated motion control, position sensing and algorithm processing

• Optimized for 200mm / 300mm silicon wafer notch/flat alignment

• Seamless communication with Brooks wafer transfer robot systems

• Industrial cleanroom grade design, low particle emission

• Built-in self-diagnosis for alignment and motion faults

• Widely used as replacement spare for legacy Brooks wafer handling tools

• 
  

Technical Specifications

• Model: 001-4130-03

• Brand: Brooks Automation

• Type: VCE Wafer Aligner Controller PCB Module

• Function: Wafer centering, notch alignment, motion control

• Applicable Wafer Size: 200mm, 300mm

• Working Environment: Semiconductor cleanroom

• Compatibility: Brooks pre-aligner & wafer handler platforms

• Status: Legacy spare part for semiconductor fabrication equipment

• 
  

Application Fields

• Semiconductor wafer fabrication cleanroom

• Lithography pre-alignment station

• Etch and deposition wafer handling systems

• Wafer sorter and FOUP handler automation

• IC manufacturing front-end process equipment

• Memory chip and logic device production lines

• Semiconductor equipment maintenance and spare part replacement

Tags:

Honeywell FC-SCNT01 51454926-1

Brooks Automation 001-4130-03

ABB PP877 3BSE069272R2 Panel 8

ABB SYN5302A-Z 3BHB006716R0217